The design of vacuum arcing chamber and insulation support sheath pipe is compact, because the outlet line conduct pole is coated silicon rubber, it can be suitable for bad weather and pollution environment. 真空灭弧室和绝缘支柱套管设计紧凑,出线导电杆外注硅橡胶,能适应恶劣的气候条件和污秽环境。
Methods and systems of diagnosing an arcing problem in a semiconductor wafer processing chamber are described. 本发明揭露一种诊断半导体晶圆处理室中的电弧问题的方法及系统。
The type vacuum arcing chamber adopts wave shape porcelain case, copper and chrome contactor material, cup shape and longitudinal magnetic field structure. 该型灭弧室采用波纹状陶瓷外壳,触头为铜铬材料,杯状纵磁场结构。
Magnetic Field Environmental With Conductor Configurations of Vacuum Arcing Chamber to Effect Short-break 真空灭弧室导电回路产生的磁场环境对灭弧室短路开断的影响
Finite Element Analysis or Hot Gas Flow Field During Current Arcing Period in Arc Chamber of SF_6 Breaker 稳态燃弧SF6断路器灭弧室内热流场有限元分析
According to the characteristics of the DC electric arc, this paper chooses the metal sheet arcing chamber and designs metal sheet, at the same time analyses magnetic field distribution of the arcing chamber when the metal sheet are composed of different materials. 根据直流电弧的熄弧特点,本文选择了金属栅片灭弧室,并对金属栅片进行了设计,分析了金属栅片选用不同材料时,灭弧室内的磁场分布情况。